OPUS3
OPUS3 / SL 是全世界最小型的自動 Prober。
可以處理沒有更換工具包的6”、8”及12”半標準晶圓，還可以使用為更小佈局的平台的產品。為了支持更多設備，OPUS3提供較快的索引時間，還提供多種溫度選項。
Opus3 is the only prober in the market which handles 6″,8″ and 12″ SEMI Standard wafer, without having any change kit. It is compact, with high accuracy for consistent contact/ probing and fast index time for higher throughput. It is possible to load universal probe card.
Kea features Overview
· Compact size for space efficiency
· Universal probe card changer
· Reliable temperature control
· Stiff and strong Z structure
· Map shift prevention
· Real-time recipe validation
· Intelligent pin alignment algorithm
· Smart probing route algorithm
· Flat loader for smartest foot print
· Compatible with all type of tester
Specification Overview
| Name | Opus3 |
|---|---|
| Wafer Size | 8 & 12 inch(6”option) |
| X,Y Probing Area | X : ±175mm |
| Y : ±165mm | |
| Needle Force | 300Kg |
| XY Accuracy | X : ±1㎛ |
| Y : ±1㎛ | |
| Tri-Temp | Ambient to 150℃ (200℃) |
| -55℃ ~ 200℃ | |
| Ambient 25℃ |